Expressions for the axial pressure profiles in a cylindrical channel and between parallel plates or a rectangular channel with large aspect ratio, with Maxwell slip gas flow are derived from first principles. The resulting expressions, which only involve the inlet and outlet pressures and the channel dimensions, will be useful in modelling or simulations of channel flows at Knudsen numbers in the range 0.001–0.1, such as in MEMS and NEMS. The expression for a cylindrical channel is validated by deriving from it an expression for the channel mass flow, which is shown to agree with a known expression for the mass flow through cylindrical channels with Maxwell slip flow. The expression for flow between parallel plates is found to agree with the zeroth order relation derived by Arkilic et al. using perturbation analysis. The effect of the accommodation coefficient on the pressure profile in a cylindrical channel is shown.