Excitation of the acoustic field leading to the Blaha effect affects the plasticity of the material significantly in ultrasonic vibration-assisted forming. In a micro-forming field, the effects are more significant in the deformation in surface of materials [1]-[3], in which reduction of the surface roughness based on the increasing of plastic deformation of surface asperity was effective [4]. On the other hand, the effect on deformation behavior of the bulk region indicted reduction in the yield stress of materials, and not only acoustic effect [5], but also impact effect is found to generate a large amount of dislocation and produce plastic deformation [6][7]. However, the effect on the bulk is more significant as that on the surface. Differences in the effect on the surface and the bulk are not clarified. In this study, the mechanism of the deformation in the surface of the material with ultrasonic vibration assistance is investigated and compared with that in the bulk. Forging tests using a newly developed ultrasonic vibrator were carried out on pure Cu foils with various process conditions. The longitudinal vibration frequency of the ultrasonic transducer is 60∓2kHz, and the vibration amplitude is in an adjustable range of 0~10μm. Forging test was carried out at different initial stress, specimen size and amplitude. The difference in acoustic softening and impact effects on the surface and the bulk was discussed.