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Nanoscale Printing of Indium-Tin-Oxide by Femtosecond Laser Pulses

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Submitted:

28 September 2022

Posted:

29 September 2022

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Abstract
Deposition/printing of materials with sub-1 μm precision and size (cross sections) is required for optical and electrical micro-devices. Crystalline c-ITO (Indium tin oxide) nanostructures were patterned on glass with a precision that formed gaps of 20-50 nm between individual disks or lines of ∼ 250 nm diameter or width. The absorbed energy density [J/cm3] followed the second order dependence on pulse energy. This facilitated high resolution and precision for nanoscale laser writing at the 515 nm laser wavelength. Patterns for optical elements such as circular gratings and micro-disks were laser printed using ITO as a resist. Unexposed amorphous a-ITO was chemically removed in aqueous 1% vol. HF solution. This use of a-ITO as solid-resist is promising for metamaterial and micro-optical applications.
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Subject: Chemistry and Materials Science  -   Nanotechnology
Copyright: This open access article is published under a Creative Commons CC BY 4.0 license, which permit the free download, distribution, and reuse, provided that the author and preprint are cited in any reuse.
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