Review
Version 1
Preserved in Portico This version is not peer-reviewed
Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review
Version 1
: Received: 26 July 2024 / Approved: 26 July 2024 / Online: 26 July 2024 (14:38:48 CEST)
A peer-reviewed article of this Preprint also exists.
Xin, C.; Xu, Y.; Zhang, Z.; Li, M. Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review. Micromachines 2024, 15, 1011. Xin, C.; Xu, Y.; Zhang, Z.; Li, M. Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review. Micromachines 2024, 15, 1011.
Abstract
High-precision displacement sensing has been widely used across from both scientific researches and industrial applications. The recent interests in developing micro-opto-electro-mechanical systems (MOEMS) have given rise to an excellent platform for miniaturized displacement sensors. Advancement in this field during past years is now yielding integrated high-precision sensors which show great potential in applications ranging from photoacoustic spectroscopy to high-precision positioning and automation. In this review, we briefly summarize different techniques for high-precision displacement sensing based on MOEMS, and discuss the challenges for future improvement.
Keywords
MOEMS; displacement; optical sensing
Subject
Engineering, Control and Systems Engineering
Copyright: This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Comments (0)
We encourage comments and feedback from a broad range of readers. See criteria for comments and our Diversity statement.
Leave a public commentSend a private comment to the author(s)
* All users must log in before leaving a comment