High entropy alloys are being increasingly investigated for their excellent combination of properties like strength, ductility, and significant low temperature fracture toughness. In the present work, the quinary equiatomic FeNiCoCrCu alloy is studied for its sputter deposition over a [001] nickel substrate using molecular dynamics simulations, described by the embedded atom method. The influence of annealing on the mechanical properties of the HEA coating is studied using nanoindentation with a virtual spherical indenter of diameter 25Å to an indentation depth of 25Å. The alloy is observed to undergo Transformation Induced Plasticity (TRIP) deformation – with activation and annihilation of stacking faults.