@article{202408.0403, doi = {10.20944/preprints202408.0403.v1}, url = {https://doi.org/10.20944/preprints202408.0403.v1}, year = 2024, month = {August}, publisher = {Preprints}, author = {Kaijie Cheng and Ji Wang and Guolong Wang and Kun Yang and Wenwu Zhang}, title = {Controllable Preparation of Fused Silica Micro Lens Array by Femtosecond‐Laser‐Induced Modification Assisted Wet Etching}, journal = {Preprints} }