@article{202409.2101,
	doi = {10.20944/preprints202409.2101.v1},
	url = {https://doi.org/10.20944/preprints202409.2101.v1},
	year = 2024,
	month = {September},
	publisher = {Preprints},
	author = {Mungunsuvd Gerelt-Od and Tatiana G. Kolesnikova and Pavel A. Mokrushev and Alexey S. Vishnevskiy and Konstantin A. Vorotilov and Andrei A. Gismatulin and Vladimir A. Gritsenko and Mikhail R. Baklanov},
	title = {Exploring the Relationship Between Electrical Characteristics and Changes in Chemical Composition and Structure of OSG Low-k Films under Thermal Annealing},
	journal = {Preprints}
}