TY  - GENERIC
DO  - 10.20944/preprints202409.2101.v1
UR  - http://dx.doi.org/10.20944/preprints202409.2101.v1
TI  - Exploring the Relationship Between Electrical Characteristics and Changes in Chemical Composition and Structure of OSG Low-k Films under Thermal Annealing
T2  - Preprints
AU  - Gerelt-Od, Mungunsuvd
AU  - Kolesnikova, Tatiana G.
AU  - Mokrushev, Pavel A.
AU  - Vishnevskiy, Alexey S.
AU  - Vorotilov, Konstantin A.
AU  - Gismatulin, Andrei A.
AU  - Gritsenko, Vladimir A.
AU  - Baklanov, Mikhail R.
PY  - 2024
DA  - 2024/09/26
PB  - Preprints