@article{202407.0106,
	doi = {10.20944/preprints202407.0106.v1},
	url = {https://doi.org/10.20944/preprints202407.0106.v1},
	year = 2024,
	month = {July},
	publisher = {Preprints},
	author = {Mikhail R. Baklanov and Andrei A. Gismatulin and Sergej Naumov and Timofey V. Perevalov and Vladimir A. Gritsenko and Alexey S. Vishnevskiy and Tatyana V. Rakhimova and Konstantin A. Vorotilov},
	title = {Comprehensive Review on the Impact of Chemical Composition, Plasma Treatment, and Vacuum Ultraviolet (VUV) Irradiation on the Electrical Properties of Organosilicate Films},
	journal = {Preprints}
}