TY  - GENERIC
DO  - 10.20944/preprints202407.0106.v1
UR  - http://dx.doi.org/10.20944/preprints202407.0106.v1
TI  - Comprehensive Review on the Impact of Chemical Composition, Plasma Treatment, and Vacuum Ultraviolet (VUV) Irradiation on the Electrical Properties of Organosilicate Films
T2  - Preprints
AU  - Baklanov, Mikhail R.
AU  - Gismatulin, Andrei A.
AU  - Naumov, Sergej
AU  - Perevalov, Timofey V.
AU  - Gritsenko, Vladimir A.
AU  - Vishnevskiy, Alexey S.
AU  - Rakhimova, Tatyana V.
AU  - Vorotilov, Konstantin A.
PY  - 2024
DA  - 2024/07/01
PB  - Preprints