@article{202408.0183,
	doi = {10.20944/preprints202408.0183.v1},
	url = {https://doi.org/10.20944/preprints202408.0183.v1},
	year = 2024,
	month = {August},
	publisher = {Preprints},
	author = {Dennis Becker and Moritz Littwin and Achim Bittner and Alfons Dehé},
	title = {Acoustic Transmission Measurements for the Mechanical Properties Extraction of Complex 3D MEMS Transducers},
	journal = {Preprints}
}