TY  - GENERIC
DO  - 10.20944/preprints202408.0183.v1
UR  - http://dx.doi.org/10.20944/preprints202408.0183.v1
TI  - Acoustic Transmission Measurements for the Mechanical Properties Extraction of Complex 3D MEMS Transducers
T2  - Preprints
AU  - Becker, Dennis
AU  - Littwin, Moritz
AU  - Bittner, Achim
AU  - Dehé, Alfons
PY  - 2024
DA  - 2024/08/05
PB  - Preprints