@article{202410.0161, doi = {10.20944/preprints202410.0161.v1}, url = {https://doi.org/10.20944/preprints202410.0161.v1}, year = 2024, month = {October}, publisher = {Preprints}, author = {Berhane Nugusse Zereay and Sandor Kalvin and György Juhász and Csaba Major and Zoltán György Horváth and Peter Petrik and Miklós Fried}, title = {Optical Calibration of the Multi-Color Ellipsometric Mapping Tool from Cheap Parts}, journal = {Preprints} }