@article{202410.0657, doi = {10.20944/preprints202410.0657.v1}, url = {https://doi.org/10.20944/preprints202410.0657.v1}, year = 2024, month = {October}, publisher = {Preprints}, author = {Ahmed Sobhi Saleh and Kristof Croes and Hajdin Ceric and Ingrid De Wolf and Houman Zahedmanesh}, title = {A Comprehensive Microstructure-Aware Electromigration Modelling Framework; Investigation of the Impact of Trench Dimensions in Damascene Copper Interconnects}, journal = {Preprints} }