@article{202407.2195,
	doi = {10.20944/preprints202407.2195.v1},
	url = {https://doi.org/10.20944/preprints202407.2195.v1},
	year = 2024,
	month = {July},
	publisher = {Preprints},
	author = {Chenguang Xin and Yingkun Xu and Zhongyao Zhang and Mengwei Li},
	title = {Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review},
	journal = {Preprints}
}