@article{202405.0200,
	doi = {10.20944/preprints202405.0200.v1},
	url = {https://doi.org/10.20944/preprints202405.0200.v1},
	year = 2024,
	month = {May},
	publisher = {Preprints},
	author = {Awadesh Kumar Mallik and Giridharan Krishnamurthy and Wen-Ching Shih and Paulius Pobedinskas and Ken Haenen},
	title = {Enhanced Etching of GaN with N2 Gas Addition during CVD Diamond Growth},
	journal = {Preprints}
}