TY  - GENERIC
DO  - 10.20944/preprints202405.0200.v1
UR  - http://dx.doi.org/10.20944/preprints202405.0200.v1
TI  - Enhanced Etching of GaN with N2 Gas Addition during CVD Diamond Growth
T2  - Preprints
AU  - Mallik, Awadesh Kumar
AU  - Krishnamurthy, Giridharan
AU  - Shih, Wen-Ching
AU  - Pobedinskas, Paulius
AU  - Haenen, Ken
PY  - 2024
DA  - 2024/05/06
PB  - Preprints