@article{202405.1427,
	doi = {10.20944/preprints202405.1427.v1},
	url = {https://doi.org/10.20944/preprints202405.1427.v1},
	year = 2024,
	month = {May},
	publisher = {Preprints},
	author = {Ziqiang Zhao and Lin Zhao and Yun Peng},
	title = {Study of Femtosecond Laser Ablation and Polishing Process on 4H-SiC Substrate},
	journal = {Preprints}
}