TY  - GENERIC
DO  - 10.20944/preprints202405.1427.v1
UR  - http://dx.doi.org/10.20944/preprints202405.1427.v1
TI  - Study of Femtosecond Laser Ablation and Polishing Process on 4H-SiC Substrate
T2  - Preprints
AU  - Zhao, Ziqiang
AU  - Zhao, Lin
AU  - Peng, Yun
PY  - 2024
DA  - 2024/05/22
PB  - Preprints