ARTICLE
|
doi:10.20944/preprints202306.1740.v1
Subject:
Chemistry And Materials Science,
Nanotechnology
Keywords:
atomic layer deposition; Hf1-xZrxO2; yttrium; crystalline phase; ferroelectric; dielectric
Online: 26 June 2023 (05:08:16 CEST)
ARTICLE
|
doi:10.20944/preprints202309.0008.v1
Online: 1 September 2023 (10:20:37 CEST)