Preprint
Article

A Fuzzy Inference System for Unsupervised Deblurring of Motion Blur in Electron Beam Calibration

Altmetrics

Downloads

263

Views

250

Comments

0

A peer-reviewed article of this preprint also exists.

This version is not peer-reviewed

Submitted:

18 October 2018

Posted:

19 October 2018

You are already at the latest version

Alerts
Abstract
This paper presents a novel method of restoring the electron beam (EB) measurements that are degraded by linear motion blur. This is based on a Fuzzy Inference System (FIS) and Wiener inverse filter, together providing autonomy, reliability, flexibility and real-time execution. This system is capable of restoring highly degraded signals without requiring the exact knowledge of EB probe size. The FIS is formed of three inputs, eight fuzzy rules and one output. The FIS is responsible to monitor the restoration results, grade their validity and choose the one that yields to a better grade. These grades are produced autonomously by analyzing results of Wiener inverse filter. To benchmark the performance of the system, ground truth signals obtained using an 18 um wire probe are compared with the restorations. Main aims are therefore a) Provide unsupervised deblurring for device independent EB measurement; b) Improve the reliability of the process; c) Apply deblurring without knowing the probe size. These, further facilitates the deployment and manufacturing of EB probes and probe independent and accurate EB characterization. It also makes restoration of previously collected EB measurements easier, where the probe sizes are not known or recorded.
Keywords: 
Subject: Engineering  -   Industrial and Manufacturing Engineering
Copyright: This open access article is published under a Creative Commons CC BY 4.0 license, which permit the free download, distribution, and reuse, provided that the author and preprint are cited in any reuse.
Prerpints.org logo

Preprints.org is a free preprint server supported by MDPI in Basel, Switzerland.

Subscribe

© 2024 MDPI (Basel, Switzerland) unless otherwise stated