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Fabrication of a Multifunctional Photonic Integrated Chip on Lithium Niobate on Insulator Using Femtosecond LaserAssisted Chemo-Mechanical Polish

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Submitted:

06 July 2019

Posted:

08 July 2019

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Abstract
We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulate (LNOI), which is achieved by femtosecond laser assisted chemo-mechanical polish. We demonstrate a high extinction ratio beam splitter, a 1 × 6 optical switch, and a balanced 3 × 3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit.
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Subject: Physical Sciences  -   Optics and Photonics
Copyright: This open access article is published under a Creative Commons CC BY 4.0 license, which permit the free download, distribution, and reuse, provided that the author and preprint are cited in any reuse.
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