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Article

A 2D Electrostatic Non-Linear Second-Order Differential Model for Electrostatic Circular Membrane MEMS Devices: A Result of Existence and Uniqueness

This version is not peer-reviewed.

Submitted:

06 November 2019

Posted:

08 November 2019

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Abstract
In the framework of 2D circular membrane Micro-Electric-Mechanical-Systems (MEMS), a new non-linear second-order differential model with singularity in the steady-state case is presented in this paper. In particular, starting from the fact that the electric field magnitude is locally proportional to the curvature of the membrane, the problem is formalized in terms of the mean curvature. Then, a result of existence of at least one solution is achieved. Finally, two different approaches prove that the uniqueness of the solutions is not ensured.
Keywords: 
Subject: 
Engineering  -   Electrical and Electronic Engineering
Copyright: This open access article is published under a Creative Commons CC BY 4.0 license, which permit the free download, distribution, and reuse, provided that the author and preprint are cited in any reuse.
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