Light pen 3D vision coordinate measurement systems are increasingly widely used due to their advantages, such as small size, convenient carrying and wide applicability. The posture of the light pen is an important factor affecting accuracy. The pose domain of the pen needs to be given so that the measurement system has a suitable measurement range to obtain more qualified parameters. The advantage of the self-calibration method is that the entire self-calibration process can be completed at the measurement site without any auxiliary equipment. After the system camera calibration is completed, we take several pictures of the same measurement point with different poses to obtain the conversion matrix of the picture, and then use spherical fitting, the generalized inverse method of least squares, and the principle of position invariance within the pose domain range. The combined stylus tip center self-calibration method calculates the actual position of the light pen probe. The experimental results show that the absolute error is stable below 0.0737 mm and that the relative error is stable below 0.0025 mm. The experimental results verify the effectiveness of the method; the measurement accuracy of the system can meet the basic industrial measurement requirements.