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Communication
A Comparative Investigation on Mechanical Properties of Tib2/Cr Multilayer Film by Indentation
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Submitted:
14 September 2022
Posted:
19 September 2022
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Abstract
Alternating TiB2-dcMS and Cr-HiPIMS layers are used to fabricate TiB2/Cr multilayer films. In-troducing a 5-nm-thick Cr interlayer deposited under a substrate bias of -60 V produces slight increases of both film hardness and elastic modulus. The TEM observation indicates that the Cr grains favor epitaxially growth on TiB2 interlayer, forming a coherent TiB2/Cr interface. This produces the hardness increasement. Mechanic measurement by using AFM illustrates that the coherent interface increases the elastic modulus of the Cr up to ~280 GPa, which is significantly higher than bulk material.
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Subject: Engineering - Mechanical Engineering
Copyright: This open access article is published under a Creative Commons CC BY 4.0 license, which permit the free download, distribution, and reuse, provided that the author and preprint are cited in any reuse.
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