There has been a growing trend of interest in metal oxide-based semiconductors (MOS) in recent times due to their superiority over silicon-based materials, as seen in recent studies [
1,
2,
3,
4]. This investigation focuses on Zinc Oxide (ZnO) as a potential semiconductor material that can endure intense radiation. ZnO possesses a wide bandgap of 3.34 eV at room temperature and a binding energy in the UV-A region (320-400 nm), along with attractive attributes such as a large surface area, low toxicity, chemical stability, electrochemical activity, and excellent conductivity [
1,
2,
3]. Furthermore, CuGaO
2 and Cu2O have the potential to form heterojunctions with ZnO-based semiconductors because of their low lattice mismatch [
2]. Previous studies have revealed that ZnO films exposed to radiation from Cobalt-60 (Co-60) showed a decline in turn-on voltage and low-frequency noise [
4,
5], but an increase in electron mobility. These changes in electrical properties were attributed to the creation of interface states and electron-hole pairs in the insulating layer [
5,
6]. Research on ZnO's ability to withstand radiation is of utmost importance, as it has been discovered to be more resilient to radiation effects than conventional and emerging transistor technologies [
1,
2,
3]. According to Nastasi et al. [
7], bombardment with heavy ions possessing keV to MeV energy levels leads to lattice disorder that is influenced by ion species, energy, temperature, dose, and channeling effects. The formation of radiation damage is also dependent on ion mass, species, target temperature, dose, energy, and flux [
8,
9]. Bombardment with ions can alter physical, mechanical, electrical, optical, and magnetic properties, thus altering their overall properties [
8]. Chee et al. [
8] carried out a simulation of GaAs exposed to ion incident energy ranging from 100 keV to 3 MeV using stopping range in ion matter (SRIM) and discovered that high-energy photon exposure degrades electrical parameters due to displacement damage. Movla et al. [
10] performed a similar study. The pre-irradiation work required before conducting irradiation experiments is a laborious process, hence a more efficient method is needed to simulate the impact of radiation on MOS semiconductors. This paper presents a proposal to simulate radiation damage trends using the finite element method and compares the results with physical experiment data.