Version 1
: Received: 29 May 2023 / Approved: 30 May 2023 / Online: 30 May 2023 (11:18:53 CEST)
How to cite:
Landi, A. Lagrange-Kirchhoff Model for curvature of Circular Silicon Plate, Annular Silicon Plate and Taiko Silicon Plate. Preprints2023, 2023052123. https://doi.org/10.20944/preprints202305.2123.v1
Landi, A. Lagrange-Kirchhoff Model for curvature of Circular Silicon Plate, Annular Silicon Plate and Taiko Silicon Plate. Preprints 2023, 2023052123. https://doi.org/10.20944/preprints202305.2123.v1
Landi, A. Lagrange-Kirchhoff Model for curvature of Circular Silicon Plate, Annular Silicon Plate and Taiko Silicon Plate. Preprints2023, 2023052123. https://doi.org/10.20944/preprints202305.2123.v1
APA Style
Landi, A. (2023). Lagrange-Kirchhoff Model for curvature of Circular Silicon Plate, Annular Silicon Plate and Taiko Silicon Plate. Preprints. https://doi.org/10.20944/preprints202305.2123.v1
Chicago/Turabian Style
Landi, A. 2023 "Lagrange-Kirchhoff Model for curvature of Circular Silicon Plate, Annular Silicon Plate and Taiko Silicon Plate" Preprints. https://doi.org/10.20944/preprints202305.2123.v1
Abstract
In this work, the analytical Lagrange-Kirchhoff model for the deformation for a taiko plate silicon is proposed. Under the conditions of validity of the linear theory of thin plates, the model is in agreement with the experimental data.
Keywords
Taiko wafer deformation
Subject
Engineering, Mechanical Engineering
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.