1. Introduction
Sensor is one of the important achievements of electronic information technology, and its emergence has changed people’s lifestyle and improved people’s quality of life[
1,
2]. Traditional strain sensors are mainly composed of rigid matter, having the disadvantages of high cost and poor ductility[
3]. During the movement process the rigidity causes discomfort and instability of sensing signal. Compared with the traditional strain sensors, the flexible strain sensors can meet all the sensing functions of the traditional strain sensors[
4,
5]. In addition, they have the advantages of low cost, good ductility and good biocompatibility, and are widely used in human motion monitoring, wearable electronic devices, electronic skin and human-computer interaction. Therefore, the strain sensors change from rigid to flexible, that is the next development trend.[
6,
7]
The flexible strain sensor is composed of flexible substrate and and conductive active material. In recent years, various flexible substrates with excellent performance have been developed, such as platinum catalyzed silica gel and polymethylsiloxane[
8] and polyurethane (PU)[
9] and other flexible substrate materials[
10]. These flexible substrate materials can be applied to various types of flexible strain sensors due to their good scalability and biocompatibility, meeting the needs of the development of flexible strain sensors towards miniaturization, integration and intelligence. The conductive materials of the flexible strain sensors have also been researched, and a variety of new nano conductive materials have been developed, such as carbon nanotube[
11,
12], metal nanowire, graphene[
13,
14] and other solid conductive materials[
15].
Although the flexible strain sensor made of solid conductive material has good sensitivity, the solid conductive material and the flexible substrate will generate large internal stress or friction from the difference of intrinsic deformation parameters, which will not only cause [
16] hysteresis, but also loss the solid conductive material and affect the service life of the flexible strain sensor[
17]. If this kind of flexible strain sensor deforms excessively, it may cause irreversible damage to the solid conductive material, making the sensor completely invalid, which limits the application of the sensors.
In addition, liquid metal[
18], ionic liquid[
19], reduced graphene oxide solution and other liquid conductive materials[
20] were obtained more and more attention. Due to the natural ductility and fluidity of the liquid itself, it not only adapt to relatively large range of deformation, also reduce the friction between the conductive material and the flexible substrate. However, it is the common approach to prepare liquid channels, then inject liquid conductive materials into the liquid channels and seal them at present[
21]. The preparation process of many liquid flexible strain sensors is cumbersome and the preparation efficiency is low.
Compared with macro sensors, micro sensors have many unique advantages, including low power consumption, wide applications, high wearing comfort and portability, and are easy to realize array sensing and distributed measurement. At the same time, the continuous reduction of sensor size is conducive to the integration of different types of sensors and the realization of powerful sensing systems. The technology of realizing micro flexible strain sensor mainly includes lithography technology[
22,
23], printing electronic technology[
24] and laser processing technology[
25]. Lithography technology is widely used, which can realize high-precision and complex microstructure preparation. However, the preparation process steps are cumbersome, the selection of sensing materials is limited, and the flexible positioning and size selection of template dependence are limited. Printing electronic technology has simple process flow, low cost, and can quickly realize diversified microstructure. However, its processing accuracy is limited, and a variety of toxic chemicals need to be added in the process of configuring printing ink. In order to solve the above-mentioned problems, this paper proposes to use the femtosecond laser direct writing technology with high processing accuracy, controllable computer programming, and no mask and toxic chemical reagents to prepare a micron wire flexible strain sensor with excellent performance, and apply it to human health signal monitoring.
Here, the liquid metal nanoparticles (LMNPs) were prepared by ultrasonic method, and then the femtosecond laser direct writing technology was used to induce the assembly and deposition of LMNPs to form microwires. A small-size micro wire flexible strain sensor was prepared. The LMNPs microwire is composed of a large number of nanoparticles burst sintering. The sintered body connection makes the flexible strain sensor have more excellent force sensing performance. The sensitivity of the sensor is as high as 76.18, the linearity is 0.999, the response time is 159 ms, and the recovery time is 120 ms. The sensor can sense various dynamic strains in real time. The application of micro linear strain sensor in human health monitoring is further explored. By installing the sensors in different parts of the human body, the monitoring of human health signals can be successfully realized. It can be detected that the change and change degree of expressions while the sensor is attached to the human face. In the same way, the vocal cord vibration can be detected for speech recognition while the sensor attached to the outside of the throat.