1. Introduction
Gallium oxide (Ga
2O
3) as an emerging wide bandgap semiconductor has sparked intense interest during the past years for its superior chemical and thermal stability, radiation hardness, and notably high breakdown electric field (~ 8 MV/cm) [
1]. Owing to the unique electric and optical characteristics, Ga
2O
3 has been explored as the workhorse for applications such as solar-blind ultraviolet photodetectors, power electronic devices, etc [2–4]. Given the ultrawide bandgap, Ga
2O
3 is regarded as an ideal host material for incorporating lanthanide element [
5]. Lanthanide ions, referred to as magic dopants, are highly effective in promoting the electrical properties of the host materials [6–8], moreover, lanthanide dopants can introduce an additional luminescent functionality to the semiconductor [
9]. The most stable oxidation state of lanthanide elements is the trivalent state (Ln
3+), which exhibits efficient upconversion and downconversion luminescence. They demonstrate unique luminescent characteristics, including abundant energy levels, sharp emission bandwidths, large Stokes shift, and high photoresistance, making them an important class of phosphor materials [10–12].
Among lanthanide elements, Er
3+-doped phosphors exhibit strong visible and near-infrared emissions from its intra-4f shell transition of Er
3+ ions, enabling diverse applications including full color displays, biological imaging, optical storage, optical communications [13–16]. So far, Er
3+-doped Ga
2O
3 has been developed for electroluminescence (EL) devices, light-emitting devices (LEDs), and photodetectors [17–20]. In terms of fundamental research and real applications, luminescent thin films are of great importance from both scientific and technological aspects [
21]. To date, Er
3+-doped Ga
2O
3 thin films have been fabricated using pulsed laser deposition (PLD) and radio frequency magnetron sputtering methods on various substrates. Ga
2O
3 has five different polymorphs, including corundum (α), monoclinic (β), defective spinel (γ), cubic (δ), orthorhombic (ε) structures. Among them, β-Ga
2O
3 is the most stable form under ambient condition, and has been extensively investigated for various applications [
22,
23]. However, fabrication of single-crystalline β-Ga
2O
3 with a perfect stoichiometry remains a daunting challenge. Recently, low-temperature deposited amorphous Ga
2O
3 (a-Ga
2O
3) has demonstrated comparable optoelectronic properties with its crystalline counterparts [
24]. Moreover, low-temperature fabricated a-Ga
2O
3 is compatible with mature CMOS technologies and favorable for flexible devices. It has been proven that a-Ga
2O
3 is qualified for high-performance X-ray and solar-blind photon detectors [
25,
26]. To date, there is no investigation on the luminescent properties of lanthanide-doped a-Ga
2O
3. The host circumstance can exert a crystal field around the lanthanide dopants and strongly influence their photoluminescence properties. According to the Judd-Ofelt theory, local symmetry around the doped lanthanide ions can render their radiative transition probabilities [
27]. Previous studies have shown that growth temperature has a huge impact on the crystallinity of Ga
2O
3 [
28]. Herein, we present an experimental investigation on the crystallinity of Ga
2O
3 host impact on the upconversion Photoluminescence (PL) from Ga
2O
3: Er thin films. The variation of photoluminescence clearly reflects the amorphous-to-crystalline transformation of the Ga
2O
3: Er thin films. We demonstrate a strong enhancement of the upconversion emissions associated with the improved crystallinity of Ga
2O
3 by increasing the growth temperature. These results identify the interplay between the crystallinity and the dopant lanthanide luminescence, which paves the way for developing lanthanide-doped Ga
2O
3 based optoelectronic devices.
2. Experiment
Target Synthesis: Er3+-doped Ga2O3 targets were synthesized via high temperature solid-state reaction method using reagent grade Ga2O3 and Er2O3 powders as raw materials. Er3+-doped Ga2O3 powders with different doping concentrations of 0.5 at%, 0.75 at%, 1 at%, 1.25 at% and 1.5 at% were prepared. The weighted Ga2O3 and Er2O3 powders were milled using alcohol for 3 h. And then, the obtained slurry was dried at 80 ºC. After that, the dried compounds were granulated with 10 wt% polyvinyl alcohol binder, pressed into disk-shaped pellets and sintered at 1450 ºC in air for 4 h.
Thin films Fabrication: Ga2O3: Er thin films were deposited on (0001) sapphire substrates by PLD using a 248-nm KrF excimer laser (Coherent COMPex205). Before deposition, sapphire substrates were ultrasonically cleaned in organic solvents, and rinsed in deionized water and blown dried with nitrogen gas. Then, the substrates were inserted into the growth chamber. A KrF excimer laser was used with a fluence of 1.5 J cm-2 and a repetition frequency of 5 Hz. The distance between target and substrate was set at 50 mm, the basic vacuum was below 1×10-4 Pa controlled by a turbo molecular pump. During the growth, the oxygen pressure was controlled to be 1 Pa. These films were achieved by setting different substrate temperatures including room temperature (RT), 300 ºC, 400 ºC, and 500 ºC. After the deposition of an hour, except for RT grown sample, other samples were slowly cooled down to room temperature.
Characterization and Luminescence Measurement: The X-ray diffraction (XRD) measurement was carried out with the Bruker D8 Advanced X-ray diffractometer under CuKα1 (λ = 1.5406 Å) radiation. The Scanning Electron Microscopy (SEM) was measured using a field emission scanning electron microscope (Zeiss Sigma 500). The UV/Vis absorption spectra were recorded with the Hitachi U-3900 UV/Vis spectro-photometer. The Photoluminescence spectrum was measured by an Acton SpectraPro 300i spectrophotometer. All upconversion spectra were excited by a 980 nm diode laser. The spectrum ranges from 480nm to 700nm. Transient decay curves were measured with a Tektronix DPO3034 oscilloscope combined with photomultiplier tube (H11902-04, Hamamatsu). All measurements were carried out at room temperature.
3. Results and Discussion
The primary advantage of the PLD technology is the stoichiometric transfer of the target material to the grown film on the substrate. In order to filter out the most efficient luminescent composition, we prepared Er
3+-doped Ga
2O
3 powders with different doping concentrations from 0.5% to 1.5%.
Figure 1a shows the XRD
θ-2
θ patterns of Er
3+-doped Ga
2O
3 powders with different doping concentrations. The characteristic diffraction peaks correspond to the monoclinic (β) phase of Ga
2O
3. The results imply that Er
3+ ions are efficiently doped into Ga
2O
3 host. Besides the diffraction peaks of Ga
2O
3, small amount of secondary phase Er
3Ga
5O
12 (ErGG) appears along with the Ga
2O
3 phase. Note that the (420) peak at 32.6° of the secondary ErGG phase increases along with the concentration of Er
3+ dopant. Compared with pure Ga
2O
3 shown in
Figure 1a, there are minor left shifts of the diffraction peak (111) for the Er
3+-doped Ga
2O
3 samples as seen in the inset of
Figure 1a. Considering that the ionic radius (0.881 Å) of the Er
3+ ion is larger than that of Ga
3+ ion (0.62 Å), it means that the lattice constant of Er
3+-doped Ga
2O
3 expands, contributing to the diffraction peaks shift to lower angles.
Figure 1b shows the upconversion PL spectra of Ga
2O
3 powders doped with different Er
3+ ion concentrations. The typical upconversion spectra of Er
3+ consist of strong green and red emission bands. Green emissions located at 524 nm and 552 nm corresponding to
2H
11/2/
4S
3/2→4I
15/2 transitions, respectively. Red emission band between 645 nm to 678 nm ascribed to
4F
9/2→4I
15/2 transition of the Er
3+ ion. It can be found that the emission intensity increases monotonically from 0.5% to 1.25% Er
3+ doping concentration, reaching its maximum value at 1.25%. And then the PL intensity decreases when the doping concentration arrives at 1.5%. Such concentration quenching is associated with the competition between the radiative and non-radiative transitions of the luminescent centers.
Taking both structural and luminescent factors into account, Ga
2O
3:1%Er target was chosen for growing Ga
2O
3: Er thin films as well as for investigating the effect of amorphous-to-crystalline transition on the luminescent properties. It is well known that the growth temperature has a great influence on the crystallinity of Ga
2O
3 during the PLD growth.
Figure 2a shows the XRD patterns of the PLD-grown Ga
2O
3: Er thin films on (0001) sapphire substrate at RT, 300 ºC, 400 ºC, and 500 ºC. The diffraction peaks at 20.4°, 41.7°, and 64.5° correspond to the (0003), (0006), and (0009) planes of sapphire, respectively. Besides the diffraction peaks of the sapphire substrate, no diffraction peaks corresponding to β-Ga
2O
3 can be found in the XRD patterns of Ga
2O
3: Er thin films grown at substrate temperatures of RT, 300 ºC, and 400 ºC. Thus, the low temperature grown Ga
2O
3: Er films tend to be an amorphous phase. As the temperature increases, three diffraction peaks located at 30.1°, 38.2° and 58.9° corresponding to β-Ga
2O
3 (400), (
) and (
) were observed at a substrate temperature of 500 ºC, indicating the formation of a crystalline β-Ga
2O
3 phase.
Figure 2b illustrates the cross-sectional SEM image of the Ga
2O
3: Er thin film grown at 500 ºC. The Ga
2O
3: Er thin film grown at high temperature exhibits a smooth and flat surface, with a uniform thickness of 480 nm.
Figure 2c,d show the surface morphology images of the Ga
2O
3: Er thin films grown at RT and 500 ºC. The RT-grown Ga
2O
3: Er thin film exhibits amorphous or poorly crystallized. And the Ga
2O
3: Er thin films grown at 500 ºC turns into crystalline phase.
Figure 3a shows the normalized ultraviolet-visible (UV-Vis) transmittance spectra of Ga
2O
3: Er thin films. All Ga
2O
3: Er thin films exhibit a sharp intrinsic transmittance edge at the wavelength of around 280 nm. The broad absorption band before 300 nm corresponds to the valence-to-conduction band transition of Ga
2O
3. There also exist some absorption bands centered at about 460 nm, 532 nm, and 660 nm derived from
Figure 3a, which can be ascribed to the 4f-4f transition of Er
3+ ions as well as the defects absorption. The bandgap
Eg can be calculated by extrapolating the linear region of the plot
(αhv)2 versus
hv, as shown in
Figure 3b, where
h is Planck’s constant,
α is the linear absorption coefficient and
ν is the transition frequency of incident photon. It can be found that
Eg increases from 4.10 eV to 4.22 eV for Ga
2O
3: Er thin films grown from RT to 500 ºC, respectively. As the growth temperature increases, the
Eg gradually increases, though it remains smaller than that of pristine Ga
2O
3. One possible reason to this reduction of
Eg due to the formation of oxygen vacancies under low-temperature growth. Moreover, Er
3+ doping may have contributed to the reduction of the Ga
2O
3 Eg.
Figure 4a shows the upconversion PL spectra from Ga
2O
3: Er thin films grown under different temperatures (RT, 300 ºC, 400 ºC, and 500 ºC). The PL spectra of the Ga
2O
3: Er films were investigated under 980 nm laser diode excitation. It was found that the RT-grown Ga
2O
3: Er thin film showed almost no PL emission, suggesting that amorphous environment hinders dopant Er
3+ ions from emitting light within an amorphous host. In other upconversion spectra, similar to the spectra of Ga
2O
3: Er targets, green emissions located at 525 nm and 549 nm arise from
2H
11/2/
4S
3/2→
4I
15/2 transitions of Er
3+ ions. While, the red emission around 659 nm corresponds to
4F
9/2→
4I
15/2 transition of Er
3+ ions. As seen from
Figure 4a, the emission intensities increase sharply with growing temperature. Notably, the emission intensity of the Ga
2O
3: Er film grown at 500 ºC was significantly enhanced compared to that of the Ga
2O
3: Er film grown at 300 ºC, at a ratio of 127 times. This means that growth at higher temperature improves the crystallinity which in turn enhances the upconversion emission. Since the 4f-4f transitions of free lanthanide ions are Laporte forbidden, the incorporation of uneven components of the crystal field when doping into a crystalline lattice allows for intra-configurational transitions to occur [
29]. Thus, compared with amorphous Ga
2O
3 host, the high-temperature grown crystalline Ga
2O
3: Er film exerts larger crystal field around the doped Er
3+ ions, contributing to the observed enhanced upconversion emissions [
30].
For further exploring the upconversion processes in Ga
2O
3: Er thin films, the pump power dependence of the upconversion emissions were investigated, as shown in
Figure 4b. The number of photons can be calculated from the relationship between upconversion (UC) emission intensity (
I) and incident pump power (
P). Using the formula of
, where
n is the number of near-infrared photons. We give the double logarithmic plot of emission intensity variation for three peaks (525 nm, 549 nm, and 659 nm) with excitation power from 0.4 to 1.8 W, which are recorded based Ga
2O
3: Er film grown at 500 ºC. Within the power range, the slope values of green and red bands can be obtained as 2.39 (525 nm), 2.31 (549 nm), 2.32 (659 nm) by a linear fit, respectively (
Figure 4c). This indicates that all these upconversion emissions belong to three-photon processes in Er
3+ ions under 980 nm excitation.
Figure 4d illustrates the possible up-conversion processes through the energy level diagram of Er
3+ ions. Upon 980 nm excitation, Er
3+ ion can populate into
4F
7/2 energy level via the excited state absorption or energy transfer processes. Subsequently, the Er
3+ ions relax nonradiatively to the
2H
11/2 and
4S
3/2 energy levels by the multiphoton relaxation, contributing to the green emissions at 525 nm, 549 nm, respectively. Some electrons of excited Er
3+ ions can further relax to the
4F
9/2 level, which gives rise to the red emissions at 659 nm.
In the end, we investigated the fluorescence lifetime of Ga
2O
3: Er thin film grown at 500 ºC.
Figure 5a shows that the lifetime at 549 nm of Ga
2O
3: Er target is about 173 μs, which is in the same order of reported Er
3+-doped oxide bulks. While, as shown in
Figure 5b the lifetime of Ga
2O
3: Er thin film grown at 500 ºC has greatly reduced to ~4.3 μs. The strongly reduced fluorescence lifetime observed in Ga
2O
3: Er thin film may arise from the appearance of abundant defects in the as-grown thin film. These defects introduce nonradiative relax channels, resulting in the reduced lifetime of the Ga
2O
3: Er thin film.