Preprint Article Version 1 Preserved in Portico This version is not peer-reviewed

Experimental and Theoretical Analysis of Rayleigh and Leaky-Sezawa Waves Propagating in ZnO/Fused Silica Substrates

Version 1 : Received: 25 June 2024 / Approved: 25 June 2024 / Online: 26 June 2024 (10:00:57 CEST)

How to cite: Caliendo, C.; Benetti, M.; Cannatà, D.; Laidoudi, F. Experimental and Theoretical Analysis of Rayleigh and Leaky-Sezawa Waves Propagating in ZnO/Fused Silica Substrates. Preprints 2024, 2024061804. https://doi.org/10.20944/preprints202406.1804.v1 Caliendo, C.; Benetti, M.; Cannatà, D.; Laidoudi, F. Experimental and Theoretical Analysis of Rayleigh and Leaky-Sezawa Waves Propagating in ZnO/Fused Silica Substrates. Preprints 2024, 2024061804. https://doi.org/10.20944/preprints202406.1804.v1

Abstract

Piezoelectric c-axis oriented zinc oxide (ZnO) thin films, from 1.8 up to 6.6 µm thick, have been grown by radio frequency magnetron sputtering technique onto fused silica substrates. A delay line consisting in two interdigital transducers (IDTs) with wavelength λ = 80 µm was photolith-ographically implemented onto the surface of the ZnO layers. Due to the IDTs split finger con-figuration and metallization ratio (0.5), the propagation of both the fundamental, third and nineth harmonic Rayleigh waves is excited; also, three leaky surface acoustic waves (SAWs) were detected travelling at velocity close to that of the longitudinal bulk wave in SiO2. The acoustic waves propagation in ZnO/fused silica was simulated by using 2D finite-element method (FEM) tech-nique to identify the nature of the experimentally detected waves. It turned out that, in addition to the fundamental and harmonic Rayleigh waves, also high-frequency leaky surface waves are ex-cited by the harmonic wavelengths; such modes are identified as leaky-Sezawa (LS) waves under cut-off. The velocity of all the modes was found in good agreement with the theoretically calcu-lated values. The existence of a low-loss region for the Sezawa wave below the cut off was theo-retically predicted and experimentally assessed.

Keywords

ZnO; fused silica; Rayleigh wave; split finger IDTs; Sezawa wave; FEM study; propagation loss; K2

Subject

Physical Sciences, Acoustics

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