Version 1
: Received: 31 July 2024 / Approved: 2 August 2024 / Online: 5 August 2024 (05:11:17 CEST)
How to cite:
Becker, D.; Littwin, M.; Bittner, A.; Dehé, A. Acoustic Transmission Measurements for the Mechanical Properties Extraction of Complex 3D MEMS Transducers. Preprints2024, 2024080183. https://doi.org/10.20944/preprints202408.0183.v1
Becker, D.; Littwin, M.; Bittner, A.; Dehé, A. Acoustic Transmission Measurements for the Mechanical Properties Extraction of Complex 3D MEMS Transducers. Preprints 2024, 2024080183. https://doi.org/10.20944/preprints202408.0183.v1
Becker, D.; Littwin, M.; Bittner, A.; Dehé, A. Acoustic Transmission Measurements for the Mechanical Properties Extraction of Complex 3D MEMS Transducers. Preprints2024, 2024080183. https://doi.org/10.20944/preprints202408.0183.v1
APA Style
Becker, D., Littwin, M., Bittner, A., & Dehé, A. (2024). Acoustic Transmission Measurements for the Mechanical Properties Extraction of Complex 3D MEMS Transducers. Preprints. https://doi.org/10.20944/preprints202408.0183.v1
Chicago/Turabian Style
Becker, D., Achim Bittner and Alfons Dehé. 2024 "Acoustic Transmission Measurements for the Mechanical Properties Extraction of Complex 3D MEMS Transducers" Preprints. https://doi.org/10.20944/preprints202408.0183.v1
Abstract
Recent publications on acoustic MEMS transducers present a new three-dimensional folded diaphragm that utilizes buried in-plane vibrating structures to increase the active area from a small chip volume. Characterization of the mechanical properties plays a key role in the development of new MEMS transducers, whereby established measurement methods are usually tailored to structures close to the sample surface. In order to access the lateral vibrations, extensive and destructive sample preparation is required. This work presents a new passive measurement technique that combines acoustic transmission measurements and Lumped-element modelling. For diaphragms of different lengths, compliances between 0.08 ∙ 10-15 and 1.04 ∙ 10-15 m³/Pa are determined without using destructive or complex preparations. In particular, for lengths above 1000 µm, the results differ from numerical simulations only by 4% or less.
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
