2.1. Nanorings Resonance for Angle Sensing
Paired resonant nanowires with a high refractive index have been theoretically and experimentally demonstrated to exhibit strong angular sensitiveness of leaky-mode resonance, suitable for angle sensors. Similarly, as a commonly used coupled waveguide device, concentric nanorings can couple and resonate with 3D light-direction angular dependence under incident light irradiation [
20]. For concentric silicon nanorings shown in
Figure 1a, the nanorings with the same width (
) and height (
) are arranged concentrically with a spacing (
), and the radius of the inner nanoring is defined as
.
When space light is incident at elevation angle (
) and azimuth angle (
), optical Mie resonances will be supported within the inner and outer nanoring cross-sections
and
determined by the coordinate angle
in cylindrical coordinates (
) (
Figure 1b), whose energy distribution can be modeled as [
21,
22,
23,
24,
25,
26]:
where
,
represent the stored energy in the inner and outer nanoring cross-sections determined by
, and
is the effective angle of incident light received by the cross-sections.
and
are the usual Hamiltonian for a pair of resonators and the non-Hermitian Hamiltonian for treating the far-field couple in leakage channels respectively. The flux
, denoting the incident light energy pumped into the resonators, and the coupling rate
are the main contributors to the angular dependency. The two quantities are determined by the 3D light-direction angles (
), which control the phase
of the excitation wave at each cross-section. Furthermore, the total energy stored in the segments of the inner and outer nanorings determined by range of
can be calculated as:
The ratio of the inner and outer energy
is a function of (
), from which the 3D light-direction angular sensitivity physical quantity is obtained. For complete concentric nanorings, the response characteristics are polarization-independent due to the strict pairwise nature of the structure, and the energy stored in the inner and outer ring differs from the spacing
and the wavelength of incident light
, as shown in
Figure 2a with the normal incident at s-polarization. In this paper,
is set as 100 nm and
is set as 550 nm within the absorptive band of Si material to ensure moderate stored energies in both inner and outer rings for ratio comparison analysis and actual detection as shown in
Figure 2a. Meanwhile, the (
) influences the resonances within the inner and outer nanorings further determine the energy stored as shown in the top and bottom of
Figure 2b, respectively.
2.2. 3D Light-Direction Sensor
To achieve 3D light-direction sensing with a single pair, the response of its structure must exhibit continuous, sensitive, uniform, and monotonous dependence on both the elevation (
) and the azimuth (
) simultaneously within the detection range. Due to the circular symmetry, the energy stored in the complete nanoring is independent of
. Thus, it is necessary to segment the nanorings to introduce azimuth angle sensitivity, and for full
sensing, at least three segments are needed as proposed in
Figure 3. Assuming that the nanorings are segmented into three pairs: S
1 , S
2 , and S
3 , the energy stored in the inner and outer segments within the same pair can be calculated as:
where the energy stored in pairs S
1, S
2, S
3 is
. According to the equations derived above, physical quantities on energy distribution exhibiting strong angles correlations can be induced, which including the ratio of energy between the inner and the outer segment within the same pair (
), and the ratio of energy stored by different pairs
. Both quantity-ratios demonstrate a strong functional dependence on the angles (
), enabling accurate 3D light-direction angles calculation, which will be elaborated in detail in the discussion section.
In working, the energy in the resonator’s segments can be further quantified as photocurrent responses. Thus, the incident angle can then be calculated by the photocurrents exported from metal (Au/Al) electrodes of the nanoring segments [
27]. Additionally, considering the practical working condition and stability of devices, the structure is fabricated on a silicon dioxide (SiO
2) substrate and most of the architecture, excluding the metal electrodes, is protected by SiO
2 to afford resistance to temperature and humidity.
In summary, the principle of high sensitivity for the segmented concentric nanorings is similar to the angular dependence expounded in the parallel straight nanowires [
13]. The non-Hermitian coupling between the inner and outer segments of the same nanoring-pair results in strong angular dependence on elevation. Therefore,
can be calculated by the ratio of photocurrents between these two segments (RPS). While, the differences in responsivities among the nanoring-pairs enable azimuthal determination, as the resonance in each pair especially depends on the azimuth. Consequently,
can be calculated by the ratio of total photocurrents between adjacent nanoring-pairs (RPP). Through reasonable adjustments, including the number of segments and structural parameters, higher precision of the 3D light-direction angles detection can be obtained. Moreover, the proposed structure behaves high symmetry to ensure translational responses to the polarization of the incident light, indicating computational universality.
For the numerical simulations of light energy absorption of different
in the proposed segmented concentric nanorings, 3D finite element method (FEM) by commercial software COMSOL was employed in wavelength domain. As shown in
Figure 4, the normalized electric field distribution varies with
and
, demonstrating obvious angular sensibility due to the resonance in the structure, confirming its functionality for 3D light-direction sensing.