Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review

Chenguang Xin; Yingkun Xu; Zhongyao Zhang; Mengwei Li

doi:10.20944/preprints202407.2195.v1

Preprint Review Version 1 This version is not peer-reviewed

Version 1 : Received: 26 July 2024 / Approved: 26 July 2024 / Online: 26 July 2024 (14:38:48 CEST)

High-precision displacement sensing has been widely used across from both scientific researches and industrial applications. The recent interests in developing micro-opto-electro-mechanical systems (MOEMS) have given rise to an excellent platform for miniaturized displacement sensors. Advancement in this field during past years is now yielding integrated high-precision sensors which show great potential in applications ranging from photoacoustic spectroscopy to high-precision positioning and automation. In this review, we briefly summarize different techniques for high-precision displacement sensing based on MOEMS, and discuss the challenges for future improvement.

MOEMS; displacement; optical sensing

Engineering, Control and Systems Engineering

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Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review

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